Micromachined 3D fractals were never easier

In a collaboration project with researchers from the University of Zaragoza (Spain), we have simplified the fabrication of our micromachined 3D fractal structures, eliminating the need of LPCVD silicon nitride and LOCOS. This was presented on the 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) and an associated conference paper.