The research I have conducted after finishing my PhD is related to the materials science of complex materials, mostly used for electronic devices. The research focuses on the structure-property relation of atomically engineered complex (nano)materials, especially thin film ceramic oxides. The class of investigated materials includes, amongst others, ferromagnetic, superconducting, ferroelectric as well as piezoelectric materials. I have advanced the field of synthesis and (in-situ) atomic-scale characterization of complex oxides, which resulted in a significant revival in the field of functional materials. In recent years, I have started new research directions in the field of functional and smart materials, such as piezoelectric and ferroelectric materials, and their integration with electronic and micro electromechanical systems (MEMS).