MESA+ University of Twente
Inorganic Materials Science Group

Inorganic Materials Science Group





Date of birth:











Ph.D candidate,

Inorganic Materials Science (IMS), MESA+ Institute for Nanotechnology, University of Twente (UT), The Netherlands

Title: “Ferroelectric and Piezoelectric properties of epitaxial PZT films and devices on silicon”

Supervisors: Prof. Dr. D. H. A. Blank and Prof. Dr. A. J. H. M. Rijnders


M.Sc candidate,

International Training Institute for Materials Science (ITIMS), Hanoi University of Technology (HUT), Hanoi, Vietnam

Title: “The influence of silver-doping on the critical current density of Bi1.6Pb0.4Sr2Ca2Cu3O10+d superconductor”

Supervisors: Prof. Dr. Than Duc Hien and Dr. Nguyen Khac Man





Senior Researcher at SolMateS company, The Netherlands

Postdoctoral researcher at IMS-UT, The Netherlands


R&D Researcher at SolMateS company, The Netherlands


Ph.D candidate researcher at IMS-UT, The Netherlands


Lecturer at ITIMS-HUT, Vietnam


Researcher at ITIMS-HUT, Vietnam


+ Ferroelectric and piezoelectric thin films: Pb(Zr,Ti)O3 (PZT), Pb(Mg1/3Nb2/3)O3/PbTiO3 (PMN-PT), BaTiO3 (BTO) and BiFeO3 (BFO).

+ Thin films fabrications: Epitaxial and Textured thin films grown on the Single-crystalline substrates (SrTiO3, MgO, LaAlO3, YSZ, …) and Silicon substrates using pulsed laser deposition and sol-gel spin coating.

+ Piezoelectric MEMS devices: Micro-diaphragms, Micro-cantilevers, Resonators and FinFETs for the applications in Micro-fluidic pumps (ink-jet printer) & micromachined ultrasonic transducers, Micro-biosensors, High-frequency filters and Tunable strained devices.



Classical- and popular musics


Historical- and detective stories


(* Corresponding author; # equal contribution)


24. B. Kaleli*, R.J.E. Hueting, M.D. Nguyen and R.A.M. Wolters, Integration of a Piezoelectric Layer on Si FinFETs for Tunable Strained Device Applications, IEEE Transaction Electron Devices 61 (2014) 1929-1935.

23. M. Boota, E.P. Houwman, M. Dekkers, M. Nguyen and G. Rijnders*, Epitaxial Pb(Mg1/3Nb2/3)O3-PbTiO3 (67/33) thin films with large tunable self-bias field controlled by a PbZr1−xTixO3 interfacial layer, Applied Physics Letters 104 (2014) 182909(1-5).

22. B. Kaleli*, M.D. Nguyen, J. Schmitz, R.A.M. Wolters, R.J.E. Hueting, Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode, Microelectronic Engineering 119 (2014) 16-19.

21. C.T.Q. Nguyen, M.D. Nguyen*, M. Dekkers, E. Houwman, H.N. Vu, G. Rijnders, Process dependence of the piezoelectric response of membrane actuators based on PZT thin films, Thin Solid Films 556 (2014) 509-514.

20. X. Wan, E. P. Houwman, R. Steenwelle, R. van Schijk, M. D. Nguyen, M. Dekkers and G. Rijnders*, Enhanced piezoelectric properties of (110)-oriented PbZr1−xTixO3 epitaxial thin films on silicon substrates at shifted morphotropic phase boundary, Applied Physics Letters 104 (2014) 092902.

19. H. Van Bui*, M. D. Nguyen, F. B. Wiggers, A. A. I. Aarnink, M. P. de Jong, and A. Y. Kovalgin, Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films, ECS J. Solid State Sci. Technol. 3 (2014) P101-P106;

18. Minh Duc Nguyen*, Evert Houwman, Matthijn Dekkers, Hung Ngoc Vu, and Guus Rijnders, A Fast Room-Temperature Poling Process of Piezoelectric Pb(Zr0.45Ti0.55)O3 Thin Films, Science of Advanced Materials 6 (2014) 243-251.

17. Minh D. Nguyen*, Thong Q. Trinh, Matthijn Dekkers, Evert P. Houwman, Hung N. Vu and Guus Rijnders, Effect of dopants on ferroelectric and piezoelectric properties of lead zirconate titanate thin films on Si substrates, Ceramics International 40 (2014) 1013-1018.


16. A. T. Tran*, G. Pandraud, F. D. Tichelaar, M. D. Nguyen, H. Schellevis and P. M. Sarro, The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes, Applied Physics Letters 103 (2013) 221909.

15. A. T. Tran*, O. Wunnicke, G. Pandraud, M. D. Nguyen, H. Schellevis and P. M. Sarro, Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators, Sensors and Actuators A 202 (2013) 118-123.

14. Evert P. Houwman*, Minh D. Nguyen*, Matthijn Dekkers and Guus Rijnders, Intrinsic stability of ferroelectric and piezoelectric properties of epitaxial PbZr0.45Ti0.55O3 thin films on silicon in relation to grain tilt, Science and Technology of Advanced Materials 14 (2013) 045006.

13. M D Nguyen*, H Nazeer, M Dekkers, D H A Blank and G Rijnders, Optimized electrode coverage of membrane actuators based on epitaxial PZT thin films, Smart Materials and Structures 22 (2013) 085013.

12. Minh Duc Nguyen*, Matthijn Dekkers, Hung Ngoc Vu and Guus Rijnders, Film-thickness and composition dependence of epitaxial thin-film PZT-based mass-sensors, Sensors and Actuators A 199 (2013) 98-105.

11. H. Yagubizade*, M. Darvishi, Y. -Y. Chen, M. D. Nguyen, J. M. Dekkers, R. J. Wiegerink, M. C. Elwenspoek and N. R. Tas, Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation, Applied Physics Letters 102 (2013) 063509.

10. Minh D. Nguyen*, Chi T. Q. Nguyen, Thong Q. Trinh, Tai Nguyen, Thao N. Pham, Guus Rijnders and Hung N. Vu*, Enhancement of ferroelectric and piezoelectric properties in PZT thin films with heterolayered structure, Materials Chemistry and Physics 138 (2013) 862-869.

9. M. Dekkers*, H. Boschker, M. van Zalk, M. Nguyen, H. Nazeer, E. Houwman and G. Rijnders, The significance of the piezoelectric coefficient d31,eff determined from cantilever structures, Journal of Micromechanics and Microengineering 23 (2103) 025008.


8. Oktay Yildirim, Michiel G. Maas, Peter J. de Veen, Minh D. Nguyen, David N. Reinhoudt, Dave H. A. Blank, Guus Rijnders and Jurriaan Huskens*, Dielectric Behavior of Self-Assembled Monolayers on Conducting Metal Oxides, Journal of Materials Chemistry 22 (2012) 2405-2409.


7. Minh D Nguyen*, Hung N Vu, Dave H A Blank and Guus Rijnders, Epitaxial Pb(Zr,Ti)O3 thin films for a MEMS application, Advances in Natural Sciences: Nanoscience and Nanotechnology 2 (2011) 015005 (1-5).

6. Minh D. Nguyen, Matthijn Dekkers, Evert P. Houwman, Ruud Steenwelle, Xin Wan, Andreas Roelofs, Thorsten Schmitz-Kempen and Guus Rijnders*, Misfit strain dependence of ferroelectric and piezoelectric properties of clamped (001) epitaxial Pb(Zr0.52,Ti0.48)O3 thin films, Applied Physics Letters 99 (2011) 252904 (1-4).

5. A. George, A. W. Maijenburg, M. D. Nguyen, M. G. Maas, D. H. A. Blank and J. E. ten Elshof*, Nanopatterning of functional materials by gas phase pattern deposition of self assembled molecular thin films in combination with electrodeposition, Langmuir 27 (2011) 12760-12768.

4. H. Nazeer*, M. D. Nguyen, L. A. Woldering, L. Abelmann, G. Rijnders and M. C. Elwenspoek, Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin films, Journal of Micromechanics and Microengineering 21 (2011) 074008 (1-7).

3. H. Nazeer*, L. A. Woldering, L. Abelmann, M. D. Nguyen, G. Rijnders and M. C. Elwenspoek, Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films, Microelectronic Engineering 88 (2011) 2345-2348.


2. M. D. Nguyen*, H. Nazeer, K. Karakaya, S. V. Pham, R. Steenwelle, M. Dekkers, L. Abelmann, D. H. A. Blank, and G. Rijnders, Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers, Journal of Micromechanics and Microengineering 20 (2010) 085022 (1-11).


1. Matthijn Dekkers#, Minh D. Nguyen#, Ruud Steenwelle, Paul M. te Riele, Dave H. A. Blank, and Guus Rijnders*, Ferroelectric properties of epitaxial Pb(Zr,Ti)O3 thin film on silicon by control of crystal orientation, Applied Physics Letters 95 (2009) 012902 (1-3).