MESA+ University of Twente
Inorganic Materials Science Group

Modified piezoelectric thin films for energy harvesters

Fig. 1Piezoelectric thin film is a chosen material for energy harvesting device, which offers a number of advantages in these systems, due to its high piezoelectric coefficients, high power output density and relatively low epsilon. Pb(Zr,Ti)O3 (PZT) was used for its good piezoelectric properties and being well controlled by Pulsed laser deposition (PLD) technique. A new reliable technique is used to integrated PZT piezoelectric thin film into micro-electromechanical system for harvesting usable electrical energy during mechanical vibration. For making a better harvesting device, the figure of merit is vital to achieve a higher piezoelectric voltage in thin film.

The main target for this project is to optimize the figure of merit of PZT thin films by applying different dopants. Both soft doping and hard doping may play a role in the electric properties, such as piezoelectric coefficient, dielectric constant and loss, mechanical factor, etc. The mechanism of the property changes with different dopants will be studied.

Both Master and Bachelor projects are suitable for this topic.

figure 2

For more information, contact : Xin Wan M.Sc (