MESA+ University of Twente
Inorganic Materials Science Group

Sub-micron thin doped barium titanate films for MLCC technology

High-k dielectric thin films of barium titanate (BaTiO3, “BTO”) are used in multi-layer ceramic capacitors (MLCC). The capacity of these films is proportional to the dielectric constant of BTO, and inversely proportional to the layer thickness. So ultra-thin layers of barium titanate phase yield the highest capacitance per unit volume. The minimum film thickness that can be achieved in industry with state of the art methods is about one micron or below. This requires the use of barium titanate starting materials with substantially smaller particle sizes.

In this project wet chemical methods for the synthesis of nanocrystalline BTO are developed. We have developed several routes involving sol-gel synthesis, microwave synthesis and hydrothermal synthesis.

Possible assignments for bachelor and master students:


synthesis of BTO nanocrystalline powders.


development BTO thin films


microstructural, spectroscopic and electrical characterization


MLCC capacitor after binder burn-out at 673 K


Sol-gel derived nano-crystalline BTO thin films on Si/SiO2.

For more information, contact Andre ten Elshof .