Project number: NNNL_V48
Title: Flying Circus Spectrometer for characterization of EUV light sources from UV to soft x-ray wavelengths
Acronym: FC Spectrometer
Project leader: Dr. M. Bayraktar (firstname.lastname@example.org)
Project team: Dr. M. Bayraktar, Dr. B. Bastiaens, Dr. B. Vratzov, Ing. C. Bruineman, Prof. Dr. F. Bijkerk
Researcher: Dr. M. Bayraktar
Extreme UV light sources are of great interest for a number of high tech applications, including photolithography. The lithography light sources are designed to emit strongly in a narrow wavelength band around 13.5 nm. However, they also emit radiation outside the desired EUV band. Knowledge about this out-of-band radiation is vital because it can cause detrimental side effects in the patterning of the fine chip features. Knowledge of this disruptive out-of-band radiation is largely missing due to the lack of a spectrometer that allows measuring over the wide wavelength range from the in-band EUV up to the UV (~400 nm). This project aims to develop a compact transmission grating based spectrometer that solves this problem as it allows to measure a wide spectral band with high precision and great detail. With this spectrometer, for the first time a comprehensive spectral diagnosis becomes possible allowing critical light source optimization for higher in-band powers and reduced out-of-band radiation.
XUV group is collaborating with several industrial partners in this project through the valorization funding granted by NanoNextNL.