MESA+ University of Twente
Industrial focus group XUV Optics

MESA+ en TNW - XUV

FC Spectrometer

Research project

 

Project number

NNNL_V48

Title

Flying Circus Spectrometer for characterization of EUV light sources from UV to soft x-ray wavelengths

Acronym

FC Spectrometer

Duration    

2016

Project leader

Dr. M. Bayraktar (m.bayraktar@utwente.nl)

Project team

Dr. M. Bayraktar, Dr. B. Bastiaens, Dr. B. Vratzov, Ing. C. Bruineman, Prof. Dr. F. Bijkerk

Researcher

Dr. M. Bayraktar

Extreme UV light sources are of great interest for a number of high tech applications, including photolithography. The lithography light sources are designed to emit strongly in a narrow wavelength band around 13.5 nm. However, they also emit radiation outside the desired EUV band. Knowledge about this out-of-band radiation is vital because it can cause detrimental side effects in the patterning of the fine chip features. Knowledge of this disruptive out-of-band radiation is largely missing due to the lack of a spectrometer that allows measuring over the wide wavelength range from the in-band EUV up to the UV (~400 nm). This project aims to develop a compact transmission grating based spectrometer that solves this problem as it allows to measure a wide spectral band with high precision and great detail. With this spectrometer, for the first time a comprehensive spectral diagnosis becomes possible allowing critical light source optimization for higher in-band powers and reduced out-of-band radiation.

XUV group is collaborating with several industrial partners in this project through the valorization funding granted by NanoNextNL.