MESA+ University of Twente
Industrial focus group XUV Optics

General purpose MESA+ clean room facilities

For general use in the XUV programme, a 1250 m2 large cleanroom, the NanoLab at MESA+, is available for extended materials analysis and specialized research. This NanoLab is shared by 400 academic and industrial users, with about 80 new users per year. It offers 28.000 hours/yr clean room usage, including assistance in training in enabling technologies. Part of the XUV optics fabrication and characterization is executed at these cleanroom facilities.