MESA+ University of Twente
Industrial focus group XUV Optics

Industrial Focus Group XUV Optics

The XUV Optics Group in a nutshell:

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an enthusiastic team of academic and engineering specialists focusing on advanced thin film research with atomic scale physics and chemistry topics,

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possessing key expertise on nanoscale film physics and the design and engineering of new XUV and soft X-ray optics,

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primarily focused on performing PhD research of excellent quality, reported in leading science journals,

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exploiting a 500 m2 laboratory with state-of-the-art instrumentation for thin film deposition and analysis, meeting highest process standards,

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motivated by academic and industrial applications in photolithography, materials analysis, space telescopes and microscopy,

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proud of a track record of transferring know-how to industry and society,

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closely involved with high-tech research and development at ASML Research, Carl Zeiss SMT, PANalytical, DEMCON, TNO and SolMateS.