ABSTRACT MAARTEN NIJLAND
Patterning of Epitaxial Perovskites from Micro and Nano Molded Stencil Masks
Maarten Nijland, Antony George, Sean Thomas, Evert P. Houwman, Jing Xia, Dave H. A. Blank, Guus Rijnders, Gertjan Koster, Johan E. ten Elshof
A process was developed that combines soft lithographic molding with PLD to make heteroepitaxial patterns of functional perovskite oxide materials. Micro- and nanostructures of sacrificial ZnO were made by micro molding in capillaries (MiMiC) and nano transfer molding (NTM), respectively, and used to screen the single crystalline substrates during subsequent PLD. ZnO was used because of its compatibility with the high temperatures reached during PLD and because of the ease of its removal after use by benefiting from its amphoteric nature. Sub-micrometer sized lines of La0.67Sr0.33MnO3 were made by the transfer molding approach, in which the anisotropic features expected for a fully oriented thin film were preserved and a magnetostatic contribution from the line shapes was introduced. Different patterns of SrRuO3 were made with lateral dimensions of a few micrometers, for which electrical isolation was illustrated. The bottom-up soft lithographic methods can be compliantly utilized for making epitaxial structures of various shapes and sizes in the µm down to the nm range, and offer unique opportunities for fundamental studies as well as for realizing technological applications.