XPS. Scanning X-ray Photoelectron Spectroscopy. A scanning X-ray beam probes a surface by creating photoelectrons. Results are amongst others the atomic composition of the surface and binding energies of the photoelectrons. Binding energies can indicate possible compounds in the surface.
- Charge neutralisation by low energy electrons and Ar-ions to keep the electronic work function constant in case of isolating materials
- Depth profile measurements by sputtering with high energy Ar-ions > 5nm
- Angle resolved measurements for non destructive depth probing < 5 nm
- Zalar rotation for better sputter profiles.
- Element mapping and line scans with a resolution of minimal 9 um.