MESA+ University of Twente
MESA+ NanoLab

Focused Ion Beam

FEI NOVA600 DUALBEAM FIB/SEM

The Nova 600 Nanolab Dualbeam SEM/FIB enables reseachers and developers to create, modify and characterize complex structures below 100 nanometers. It combines ultra-high resolution field emission scanning electron microscopy (SEM) and precise focused ion beam (FIB) etch and deposition to complement existing technology in Mesa+ NanoLab and extend many application with nanoscale prototyping, machining, 2D and 3D-characterization and RAMAN analysis.

Structures such as photonic crystal prototyping; laser on a chip prototyping; nano-stamping and modification of MEMS devices like AFM tips have been created with the Nova 600 Nanolab. Analysis of these and other structures is enabled via several FIB-methods like cross-sectioning and TEM preparation. Combined with its SEM's ultra high resolution in-lens backscattered electron imaging phase contrast characterization, secondary ion imaging for grain contrast and STEM for nm-sized characterization makes the NOVA 600 one of the most versatile instruments in the MESA+NanoLab.