The group of Semiconductor Components at the University of Twente is part of the Faculty of Electrical Engineering, Mathematics and Computer Science and the MESA+ Institute for Nanotechnology. MESA+ is the largest research institute of the University of Twente. The institute trains graduate students and PhD-students and conducts research in the fields of nanotechnology, microsystems, materials science and microelectronics. Unique of MESA+ is its multidisciplinary composition.

The group of Semiconductor Components has a vacancy for a Ph.D. student in the project “Monitoring Si/Sn interactions with atomic hydrogen”. This project studies the surface of EUV mirrors under exposure to chemicals and EUV light, and aims to understand etching and deposition processes at this surface.


In extreme-UV lithographic steppers, reflective optics are employed. These deteriorate over time under operating conditions as a result of surface contamination, leading to a significant decrease in output power of the system within an unacceptably short operational time. Therefore, frequent maintenance is necessary at present. In this project deposits of tin- and silicon-containing surface contaminations are studied, as well as techniques for their in-situ removal, aiming to optimize debris mitigation and cleaning strategies, thereby prolonging lifetime of the mirrors. The experiments, to a large extent, will consist of studying film etching and deposition processes (a.o. UV activated) by in-situ monitoring with absorption spectroscopy (FTIR) and spectroscopic ellipsometry.

Type of work: 40% experimental studies using a custom-built vacuum system in a Si technology cleanroom, 20% material analysis, 20% process modelling, 10% internship at ASML, 10% educational tasks.

Our offer:

We offer an interesting temporary research position in a dynamic and international environment, with the benefits of an industrial laboratory as well as academic research. You will be appointed for a period of four years as a temporary research employee, as detailed in the collective labour agreement of the Dutch Universities. A training program is part of the agreement.

The University of Twente offers excellent working conditions, an exciting scientific environment, and a green and lively campus. We offer

· A PhD position for four years (38 hrs/week).

· Full status as an employee at the University of Twente, including pension and health care benefits.

· Gross salary PhD student: ranging from EUR 2174 (1st year) to EUR 2779 (4th year) per month, plus holiday allowance (8%) and end-of-year bonus (8.3%).

· Excellent facilities for professional and personal development.

· Good secondary conditions, in accordance with the collective labour agreement CAO-NU for Dutch universities.

A green campus with lots of sports facilities and an international scientific community.

Your profile and further information:

We are looking for a highly motivated and enthusiastic researcher (F/M) with a M.Sc. degree in applied physics, plasma chemistry, materials science or a related topic, with excellent theoretical and experimental skills. A solid knowledge of spectroscopic techniques with certain practical experience will be additionally appreciated. We seek candidates with good team spirit and multidisciplinary curiosity, who like to work in an internationally oriented environment. Fluency in English is a requirement. An interview will be part of the selection procedure.

Applications should include an application/motivation letter, emphasizing your specific interest, qualifications and motivation to apply for this position, a detailed CV (resume), a publication list, and an academic transcript of B.Sc. and M.Sc. education. A TOEFL or IELTS score is generally requested to verify sufficient mastering of the English language. You can electronically apply for this position before 1 March 2016. For more information please contact our secretary of Semiconductor Components Group Mrs. Remke Assink at