EuroCVD 2013

Alexey Kovalgin presented a paper on low-temperature fabricated waveguides for integration of optics into microchips at the recently held EuroCVD conference in Varna, Bulgaria. Using our home-built ICPECVD deposition system, we produced highly transparent silicon oxynitride material at a deposition temperature of only 150 C, whereas commonly, temperatures above 700 C are employed.