Micro Sensors & Systems
Integrated Wobbe index meter
This project aims at the realization of a miniaturized Wobbe index meter for the measurement of the energy content of fuel gases, with most parts integrated on a single silicon chip.
Silent sensors for stellar echo’s and seismic surveys
SENSEIS will develop ultra-sensitive readout electronics for micro-electromechanical (MEMS) accelerometers in the low 1-100 Hz frequency band.
Coriolis-based sensor and actuator systems
This NanoNextNL project investigates alternative fabrication techniques and actuation and readout methods for our micro Coriolis mass flow sensor
Technologies for infusion pump Improvement and calibration
The Eurostars TIPICAL project aims to improve infusion systems such as pumps and bags, by developing flow sensors for real-time diagnostic purposes, a calibration method, and a transfer standard.
Low-cost biocompatible micro Coriolis mass flow sensor
In this project a demonstrator device will be realized of a low-cost micro Coriolis mass flow sensor
PiezoMEMS for FLOW+
In this FLOW+ project we will investigate microfluidic sensors with piezoelectric actuation and detection
Thermal noise limited micro Coriolis mass flow sensor
In this FLOW+ project we will investigate the fundamental noise limits for micro Coriolis mass flow sensors.
Recently finished projects
Acoustic Passive Radar
The APRA project aims at the realization of new robust, multidimensional acoustic particle velocity sensors.
Micro-valves for precise flow dosage
In the MIVADO project, research has been done towards the realization of a micro valve for compact and accurate dosage systems.
Power Sensor – Power Glove
Within the Power Sensor – Power Glove project (STW project 10333) a miniature multi-axis force sensor has been developed to accurately measure the forces at the interface of the hand.
PRECISE - Chemical micro propulsion for an efficient and accurate control of satellItes for space exploration
In the EU FP7 project PRECISE we have realized a micro Coriolis mass flow sensor for measurement of hydrazine flow and a micro Prandtl tube sensor for micro thruster characterization.
Parallel plate structures for optical modulation
The aim of the project Parallel plate structures for optical modulation within the MEMPHIS programme was to investigate the realization and control of micromachined plates suspended at extremely small distance from the substrate.