Micro Sensors & Systems
Integrated Wobbe index meter
This project aims at the realization of a miniaturized Wobbe index meter for the measurement of the energy content of fuel gases, with most parts integrated on a single silicon chip.
Silent sensors for stellar echo’s and seismic surveys
SENSEIS will develop ultra-sensitive readout electronics for micro-electromechanical (MEMS) accelerometers in the low 1-100 Hz frequency band.
Coriolis-based sensor and actuator systems
This NanoNextNL project investigates alternative fabrication techniques and actuation and readout methods for our micro Coriolis mass flow sensor
Technologies for infusion pump Improvement and calibration
The Eurostars TIPICAL project aims to improve infusion systems such as pumps and bags, by developing flow sensors for real-time diagnostic purposes, a calibration method to accurately calibrate the infusion pumps, and a transfer standard to travel between the calibration laboratories and the point-of-use.
Acoustic passive radar
The APRA project aims at the realization of new robust, multidimensional acoustic particle velocity sensors.
Low-cost biocompatible micro Coriolis mass flow sensor
In this project a demonstrator device will be realized of a low-cost micro Coriolis mass flow sensor
Recently finished projects
Micro-valves for precise flow dosage
In the MIVADO project, research has been done towards the realization of a micro valve for compact and accurate dosage systems. The basic principle of a micro valve realized in silicon was already demonstrated in earlier projects, however much further research was needed to obtain sufficient reliability, lifespan and leak tightness.
Power Sensor – Power Glove
Within the Power Sensor – Power Glove project (STW project 10333) a miniature multi-axis force sensor has been developed to accurately measure the forces at the interface of the hand.
PRECISE - Chemical micro propulsion for an efficient and accurate control of satellItes for space exploration
In the EU FP7 project PRECISE we have realized a micro Coriolis mass flow sensor for measurement of hydrazine flow and a micro Prandtl tube sensor for micro thruster characterization.
Parallel plate structures for optical modulation
The aim of the project Parallel plate structures for optical modulation within MEMPHIS (http://www.smartmix-memphis.nl/) was to investigate the realization and control of micromachined plates, suspended at extremely small distance above the substrate. Such plates are basic building blocks in many applications, e.g. power sensors, optical modulation using a mechanical structure in evanescent field, electro-mechanical tuning and electrical and optical switches.