MESA+ University of Twente
Micro Sensors & Systems

PiezoMEMS for FLOW+

In this project we will investigate the use of Pb(Zr,Ti)O3 (PZT) piezoelectric layers in sensors for fluid flow, and fluid parameters like density and viscosity. We propose to combine PZT thin films with the so-called surface channel technology (SCT) that is used to realize silicon nitride tubes on a silicon chip. SCT technology has already shown to be a versatile technique that allows fabrication of a multitude of devices, e.g. thermal and Coriolis mass flow sensors, pressure sensors, micro valves, sensors for density, viscosity and thermal conductivity of the medium and sensors for IR spectroscopy. Adding piezoelectric actuation and detection will further enhance the possibilities offered by the technology.