MESA+ University of Twente
Micro Sensors & Systems

Nano-G accelerometer

Geometric anti-spring (GAS) technology is a concept originating from the gravitational wave detector community, where it is used to lower the resonance frequency of large seismic isolation filters [1]. This concept can be miniaturized and integrated into a MEMS accelerometer to achieve nano-g sensitivity [2]. The device consists of a proof mass suspended by curved springs. The springs are compressed using on-chip actuators in the direction perpendicular to the sensing direction. Using this technique, an increase in sensitivity by a factor 26 was demonstrated.


[1] A. Bertolini et al., "Seismic noise filters, vertical resonance frequency reduction with geometric anti-springs: a feasibility study", Nucl. Instr. And Meth. A 435 (1999) 475
[2] B.A. Boom et al., "Nano-G accelerometer using geometric anti-springs", MEMS 2017, Las Vegas, NV, USA, January 22-26, 2017