Welcome to the site of the Micro Sensors and Systems (MSS) group. At MSS we specialize in three-dimensional nano- and microfabrication based on top down lithography methods. Within the MESA+ Research Institute for Nanotechnology, we invent new fabrication techniques and acquire fundamental understanding on the underlying physics. We demonstrate the techniques on various devices and try to understand the science of working principles and design, with the aim to ultimately transfer our knowledge to industry. We work closely together with the Mesoscale Chemical Sytems group and the Semiconductor Components group. As of January 1st, 2018, the MSS and SC groups will merge into a new group Integrated Devices and Systems (IDS). A new web site is currently under development.
We contribute substantially to the classical physics education of engineers at the University of Twente, mainly the Electrical Engineering and Advanced Technology bachelor tracks, Electrical Engineering and Nanotechnology master programs and Nanodevices and Systems graduate school.