MESA+ University of Twente
Micro Sensors & Systems

Research Group Micro Sensors & Systems

Welcome to the site of the Micro Sensors and Systems (MSS) group. At MSS we specialize in three-dimensional nano- and microfabrication based on top down lithography methods. Within the MESA+ Research Institute for Nanotechnology, we invent new fabrication techniques and acquire fundamental understanding on the underlying physics. We demonstrate the techniques on various devices and try to understand the science of working principles and design, with the aim to ultimately transfer our knowledge to industry. We work closely together with the Mesoscale Chemical Sytems group and the Semiconductor Components group. As of January 1st, 2018, the MSS and SC groups will merge into a new group Integrated Devices and Systems (IDS). A new web site is currently under development.

We contribute substantially to the classical physics education of engineers at the University of Twente, mainly the Electrical Engineering and Advanced Technology bachelor tracks, Electrical Engineering and Nanotechnology master programs and Nanodevices and Systems graduate school.


21 NOV 2017 - Joost Lötters awarded with PIHC 2017 voucher Joost Lötters received a PIHC voucher of EUR 75,000 for his project "Measurement of Medicine Mixtures in IV Systems". 3 NOV 2017 - Merging of the MSS and SC groups As of January 1st, 2018 the research groups MSS and SC will merge into a new group IDS, "Integrated Devices and Systems". 1 NOV 2017 - Three abstracts accepted for MEMS 2018 conference Yaxiang Zeng, Dennis Alveringh and Thomas Schut will present their work at the upcoming MEMS conference in Belfast. 4-6 OCT 2017 - MFHS Conference From 4 – 6 October 2017 the 3rd International Conference on Microfluidic Handling Systems (MFHS 2017) was held in Enschede. 13 MAR 2017 - Joost Lötters appointed in Board of experts for the national measurement standards As of March 1st, 2017, prof. dr. ir. Joost Lötters has been appointed member of the Board of experts for the national measurement standards. 17 FEB 2017 - Dennis Alveringh at Transducers 2017 conference Dennis Alveringh will present his work on the integration of pressure sensors with a micro Coriolis mass flow sensor at the Transducers 2017 conference. 24 NOV 2016 - Boris Boom at MEMS 2017 conference Boris Boom will present his work on ultra low-noise MEMS accelerometers at the MEMS 2017 conference in Las Vegas. 4 NOV 2016 - Joost Lötters on television and radio at RTV Oost Joost Lötters in television show “Overijssel Vandaag” at RTV Oost, Friday November 4th, 17:20–17:40, and on the radio in “Punt Komma” after 17:40. 25 JUL 2016 - Joost Lötters appointed as member of the TPC of the MEMS conference Joost Lötters was appointed as member of the executive technical program committee of the MEMS 2017 conference in Las Vegas. 4 JUL 2016 - 14th NAMIS workshop at University of Twente On July 4-6, 2016, the 14th NAMIS workshop will take place on the campus of the University of Twente. The theme of the workshop will be "3D Micro and Nano Systems". 24 MAR 2016 - Special Issue "Microfluidic Sensors and Control Devices" A special issue of Sensors (ISSN 1424-8220) will be devoted to microfluidic sensors and control devices. Deadline for manuscript submissions: 31 December 2016.