Scope and Content

The workshop covers the areas of materials, processing technology and devices. The organising committee invites papers in any subject related to Micromachining, Micromechanics and Microsystems, including, but not restricted to:

- Fabrication technologies and processes
- Materials
- Design and simulation tools
- Microcomponent packaging and solutions
- Device and process characterization
- Sensing and actuation applications
- Microfluidic components and systems
- System integration of MEMS, NEMS, RF MEMS and MOEMS
- Bio MEMS

Substantial time is reserved for poster sessions. Authors will be given the opportunity to highlight the essence of their work in a 2-minute flash oral presentation prior to the poster session. Ample time will be available during the poster sessions for discussions of new ideas and results. Young scientists are encouraged to present their on-going work. The workshop offers an attractive meeting place where new and important achievements can be discussed.