UTFacultiesTNWDept NEMResearchXUVThesis assignmentsSpectral Unraveling (SUN) of EUV light sources

Spectral Unraveling (SUN) of EUV light sources

assignment

Spectral Unraveling (SUN) of EUV light sources: A broadband transmission grating spectrometer approach

Contact: Dr. Muharrem Bayraktar (m.bayraktar@utwente.nl)

The XUV Optics group is undertaking an exciting project based on a newly developed optical component: a nanoscale patterned transmission grating that enables high resolution spectroscopy. The project goal is to do a comprehensive spectral characterization of EUV sources, through measurement of source spectrum in a broad wavelength range, from EUV to visible. Industry has shown interest and a recent grant was received for further optical and technological development of spectrometers. Currently a wealth of spectroscopic data is being gathered from several EUV sources including the most powerful industrial sources in the world.

The goal in this assignment (BSc or MSc) can be designing of new gratings or developing methods for retrieval of the emitted spectra from measurements. A particular challenge in the retrieval is the overlap of several diffraction orders of the grating and contribution of the noise. Candidate solutions include a first method to stitch spectra retrieved from 1st order measurements with several bandpass filters, and a second method to remove all higher order diffraction contributions from measured spectrum. In this project, you can gain experience in principles of spectrometers and spectroscopic analysis.