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Analysis of thin films with Low Energy Ion Scattering

Analysis of thin films with Low Energy Ion Scattering

Contact: Dr. A. Yakshin, a.yakshin@utwente.nl (or Adele Valpreda, a.valpreda@utwente.nl) 

Project nature: experimental and/or simulations, data analysis

Low Energy Ion Scattering (LEIS) is a unique tool for characterizing surface composition.

The technique is based on the backscattering of noble gas ions. This process is particularly sensitive to the elemental nature of the outermost layer on atomic the scale. The study of the structure at these length scales is very important for the quantitative determination of the chemical composition of thin films and the formation of interfaces in deposition processes. Additionally to the surface composition, LEIS measurements also provide information about the in-depth distribution of elements. However, the physics behind Low Energy Ion Scattering is still a field of study and the reconstruction of the in-depth information from the measurement is still a challenge.

At XUV Optics group, we use and perform research on LEIS, with the ultimate aim of improving the characterization of thin films and multilayers. Within this research, we have designed a BSc project that can be partially adapted to your interests.

Whether you are interested in expanding your lab experience or improving your coding skills, by the end of the project you will have contributed to the understanding of the physics behind Low Energy Ion Scattering and you will have improved your abilities in data analysis.