Industrial Focus Group XUV Optics

PhD theses overview

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2025

Diving into thin-film interfaces using low energy ion scattering (2025) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Valpreda, A. https://doi.org/10.3990/1.9789036565844 A Universal Model for Hydrogen−Induced Reduction of Transition Metal Compounds (2025) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Rehman, A. https://doi.org/10.3990/1.9789036565288 Cu-based transparent conductive materials with enhanced conductivity (2025) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Mirza, A. S. https://doi.org/10.3990/1.9789036563772

2022

Surface and interface diffusion processes in nanoscale thin films (2022) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Chandrasekaran, A. https://doi.org/10.3990/1.9789036554763 Fracture behavior and characterization of free-standing metal silicide thin films (2022) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Shafikov, A. https://doi.org/10.3990/1.9789036554251 Nucleation, growth and hydrogen resistance of multi-layer graphene (2022) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Kizir, S. https://doi.org/10.3990/1.9789036552820

2021

Diffusion of oxygen in nanoscale-thin transition metal films (2021) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Stilhano Vilas Boas, C. R. https://doi.org/10.3990/1.9789036551533 W-based multilayer soft X-ray Bragg optics: Synthesis and characterization (2021) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Medvedev, R. https://doi.org/10.3990/1.9789036551564 Layer Growth And Hysteresis Modelling Of Epitaxial Lead Zirconate Titanate Thin films (2021) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . Lucke, P. https://doi.org/10.3990/1.9789036551526

2020

Optical detection of hydrogen diffusion through thin film barrier materials (2020) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Soroka, O. https://doi.org/10.3990/1.9789036550789 Near-Threshold Sputtering and Ion Transport in Transition Metals (2020) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Phadke, P. https://doi.org/10.3990/1.9789036550833 Damage processes in ruthenium thin films induced by ultrashort laser pulses (2020) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Milov, I. D. https://doi.org/10.3990/1.9789036550536

2018

Extreme UV photon and hydrogen radical interaction with graphene and ruthenium surfaces (2018) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Mund, B. K. https://doi.org/10.3990/1.9789036546577 Probing atomic scale interface processes using X-rays and ions (2018) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Zameshin, A. https://doi.org/10.3990/1.9789036546508 Structure control of La/B multilayer systems by partial nitridation (2018) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Kuznetsov, D. S. https://doi.org/10.3990/1.9789036546546 Metal diffusion and chemical processes of mono and bi-layer thin films (2018) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Pachecka, M. https://doi.org/10.3990/1.9789036545686 Hydrogen induced blister formation in Mo/Si multilayer structures (2018) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . van den Bos, R. A. J. M. https://doi.org/10.3990/1.9789036545143 Plasma-assisted cleaning of extreme UV optics (2018) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Dolgov, A. A. https://doi.org/10.3990/1.9789036545068

2017

Smart multilayer interactive optics for lithography at extreme UV wavelengths (2017) [Thesis › EngD Thesis] . University of Twente . Antonov, O. Growth and thermal oxidation of Ru and ZrO2 thin films as oxidation protective layers (2017) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Coloma Ribera, R. https://doi.org/10.3990/1.9789036543101

2016

Illuminating the structure of borides through X-ray absorption spectroscopy (2016) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Huber, S. https://doi.org/10.3990/1.9789036541824 Numerical study of extreme-ultra-violet generated plasmas in hydrogen (2016) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Astakhov, D. https://doi.org/10.3990/1.9789036541114

2015

Tailoring spectral properties of Extreme UV multilayer optics (2015) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . Medvedev, V. V. https://doi.org/10.3990/1.6051304 Analysis of extreme ultraviolet induced surface defect processes (2015) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Gao, A. https://doi.org/10.3990/1.9789036539852 Adaptive multilayer optics for extreme ultraviolet wavelengths (2015) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Bayraktar, M. https://doi.org/10.3990/1.9789036538459

2014

Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers (2014) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . Nyabero, S. L. https://doi.org/10.3990/1.9789462590700

2013

Structural and reflective characteristics of multilayers for 6.x nm wavelength (2013) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . Makhotkin, I. A. https://doi.org/10.3990/1.9789461919120 Hydrogen particle and plasma interactions with heterogeneous structures (2013) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . Kuznetsov, A. https://doi.org/10.3990/1.9789090278063 Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation (2013) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . Bosgra, J. https://doi.org/10.3990/1.9789461917942 Single-order lamellar multilayer gratings (2013) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . van der Meer, R. https://doi.org/10.3990/1.9789036535236

2012

Physics and technology development of multilayer EUV reflective optics (2012) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Louis, E. https://doi.org/10.3990/1.9789090271637

2011

Ion-enhanced growth in planar and structured Mo/Si multilayers (2011) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . van den Boogaard, T. https://doi.org/10.3990/1.9789461911209 Characterization of EUV induced contamination on multilayer optics (2011) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . Chen, J. https://doi.org/10.3990/1.9789053354254 Diffusion phenomena in chemically stabilized multilayer structures (2011) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . Bruijn, S. https://doi.org/10.3990/1.9789491211225

2010

Nanoscale diffusion, compound formation and phase transitions in Mo/Si multilayer structures (2010) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . de Rooij-Lohmann, V. I. T. A. https://doi.org/10.3990/1.9789053353141

2009

Surface and interface dynamics in multilayered systems (2009) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Tsarfati, T. https://doi.org/10.3990/1.9789053351970

2007

Interface structure and interdiffusion in Mo/Si multilayers (2007) [Thesis › PhD Thesis - Research UT, graduation UT] . University of Twente . Nedelcu, I. https://doi.org/10.3990/1.9789036525503

2005

Interfaces in soft X-ray multilayer mirrors (2005) [Thesis › PhD Thesis - Research external, graduation UT] . University of Twente . Kessels, M. J. H.