UTFacultiesTNWResearchDept CEMCSNewsBIOS and MCS develop a cheaper method to make sub 30 nm periodic structures

BIOS and MCS develop a cheaper method to make sub 30 nm periodic structures

a cheaper method to make sub 30 nm periodic structures

People from the BIOS and MCS groups have published a conference paper (MicroTAS 2016) on a technique we have developed to make extremely small (less than 30 nm) periodic structures without the use of a deep-UV light source for lithography. This can make batch production of such structures relatively cheap.