UTFacultiesTNWResearchDept MSTFIFNewsIn-situ imidization analysis in microscale thin films of an ester-type photosensitive polyimide for microelectronic packaging applications

In-situ imidization analysis in microscale thin films of an ester-type photosensitive polyimide for microelectronic packaging applications

A joint publication with colleagues from Dresden, in European Polymer Journal.

The influence of the UV crosslinkable methacrylic functional group in the polymer side chain of an ester-type photosensitive polyimide on the thermal imidization reaction is investigated with various techniques. Our contribution is the Thermo-Ellipsometric Analysis (TEA).