PHI Quantera SXM - XPS
Scanning X-ray Microscopy - X-ray Photoelectron Spectroscopy. A scanning X-ray beam probes a surface by creating photo electrons over a wide range of energies. The spectra result amongst others in the atomic composition of the outermost 3-5 nm of a sample and element specific binding energies of the photo electrons. Chemically shifted binding energies indicate compounds that are present at the outermost surface.
- Charge neutralisation by low energy electrons and low energy argon ions to keep the electronic work function constant in case of isolating materials.
- Depth profile measurements can be done by etching the sample with high energy Ar-ions. Depth resolution >= 5 nm
- Angle resolved measurements for non destructive depth probing <= 5 nm
- Zalar rotation of the sample for better sputter profiles.
- Element mapping and line scans with a lateral resolution of minimal 9 um.