People

Dr.ir.B (Bram) Krijnen

Thesis:

https://research.utwente.nl/en/publications/a-large-stroke-planar-mems-based-stage-with-integrated-feedback

Journal articles:

B. Krijnen, D.M. Brouwer, L. Abelmann, J.L. Herder, Vacuum behavior and control of a MEMS stage with integrated thermal displacement sensor, Sensors & Actuators: A. Physical, 2016, DOI: 10.1016/j.sna.2015.09.005.

B. Krijnen, K. Swinkels, D.M. Brouwer, L. Abelmann, J.L. Herder, A large-stroke 3DOF stage with integrated feedback in MEMS, Journal of Microelectromechanical Systems (ISSN 1057-7157), 24(6), pp. 1720-1729 (2015) DOI:10.1109/JMEMS.2015.2432054 .

J.P. Meijaard, B. Krijnen, D.M. Brouwer, Deflection of a misaligned finger of a comb drive in an electrostatic field, Journal of Microelectromechanical Systems (ISSN 1057-7157), 23(4), pp. 927-933 (2014) DOI: 10.1109/JMEMS.2014.2300233

B. Krijnen, D.M. Brouwer, Flexures for large stroke electrostatic actuation in MEMS, Journal of Micromechanics and Microengineering (ISSN 0960-1317) 24 015006 (2014). DOI: 10.1088/0960-1317/24/1/015006

B. Krijnen, R.P. Hogervorst, J.W. van Dijk, D.M. Brouwer, J.B.C. Engelen, L. Woldering, L. Abelmann and H.M.J.R. Soemers, A single-mask thermal displacement sensor in MEMS, Journal of Micromechanics and Microengineering (ISSN 0960-1317), 21(7), pp. 074007-074019 (2011). DOI: 10.1088/0960-1317/21/7/074007