This specialization belongs to the master's programme Electrical Engineering.
Micro Sensors and Systems centres on three-dimensional nanofabrication and microfabrication based on top-down lithography methods.
Research at MSS is conducted at the MESA+ Research Institute for Nanotechnology. We specialize in three-dimensional nanofabrication and microfabrication based on top-down lithography methods. We invent new fabrication techniques and demonstrate them on various devices with the aim of ultimately transferring our knowledge to industry. We are working on three generations of fabrication technologies, in different stages of the process between fundamental research and application: microtechnology, nanotechnology and self-assembly.
The specialization Micro Sensors and Systems (MSS) is directly linked with the research group Micro Sensors and Systems and research institute MESA+. This means you will have excellent peer guidance and will be working on the newest challenges.