Research

Goal is the fabrication of microfluidic networks in fused silica. This project involves the development and optimization of micromachining techniques and methods, such as selective wet-etching, and dry-etching, for the realization of microfluidic channels fully embedded in fused silica. Issues that are investigated are for example masking materials, quality of manufactured structures (structure definition, roughness), and process-integration into prototypes. Chips are fabricated in the Nanolab cleanroom facilities of the MESA⁺ Institute for Nanotechnology.