Publications

Reviewed journal papers:

D.C. Hermes, T. Heuser, E.J. van der Wouden, J.G.E. Gardeniers and A. van den Berg
Fabrication of microfluidic networks with integrated electrodes
Microsystem Technologies 12 (2006) pp. 436-440.

R.E. Oosterbroek, D.C. Hermes, M. Kakuta, F.Benito-Lopez, W. Verboom, J.G.E. Gardeniers and A. van den Berg
Fabrication and mechanical testing of glass chips for high pressure synthetic or analytical chemistry
Microsystem Technologies 12 (2006) pp. 450-454.

E.E. Krommenhoek, J.G.E. Gardeniers, J.G. Bomer, A. Van den Berg, X. Li, M. Ottens, L.A.M. van der Wielen, G.W.K. van Dedem, M. Van Leeuwen, W.M. van Gulik, J.J. Heijnen
Monitoring of yeast cell concentration using a micromachined impedance sensor
Sensors and Actuators B 115 (2006) pp. 384-389.

R.M. Tiggelaar, J.G.E. Gardeniers and A. van den Berg
Silicon-based microreactors as research tools in chemistry
Chemistry Today 24 (2006) 52-54.

V. Fekete, D. Clicq, W. De Malsche, H. Gardeniers, and G. Desmet
Detection enhancement in nano-channels using micro-machined silicon groove
Journal of Chromatography A 1130 (2006) 151-157.

E.J. van der Wouden, D.C. Hermes, J.G.E. Gardeniers and Albert van den Berg
Directional flow induced by synchronized longitudinal and zeta-potential controlling AC-electrical fields
Lab on a Chip 6 (2006) 1300-1305.

W. De Malsche D. Clicq, H. Eghbali, V. Fekete, H. Gardeniers and G. Desmet
An automated injection system for sub-micron sized channels used in shear-driven-chromatography
Lab on a chip 6 (2006) 1322-1327.

M. de Pra, W.Th. Kok, J.G.E. Gardeniers, G. Desmet, S. Eeltink, J.W. van Nieuwkasteele, and P.J. Schoenmakers
Experimental study on band dispersion in channels structured with micro-pillars
Analytical Chemistry 78 (2006) 6519-6525.

P. Marmottant, J.P. Raven, J.G.E. Gardeniers, J.G. Bomer and S. Hilgenfeldt
Microfluidics with ultrasound-driven bubbles
Journal of Fluid Mechanics 568 (2006) 109-118.

R.M. Tiggelaar, F. Benito-López, D.C. Hermes, H. Rathgen, R.J.M. Egberink, F.G. Mugele, D.N. Reinhoudt, A. van den Berg, W. Verboom, H.J.G.E. Gardeniers
Fabrication, mechanical testing and application of high-pressure glass microreactor chips
Chemical Engineering Journal, accepted

S. Vankrunkelsven, D. Clicq, D. Cabooter, W. De Malsche, J.G.E. Gardeniers, Gert Desmet
Ultra-rapid separation of an angiotensin mixture in nanochannels using shear-driven chromatography
Journal of Chromaography A 1102 (2006) 96-103.

H.D. Tong, F.C. Gielens, J.G.E. Gardeniers, H.V. Jansen, J.W. Berenschot, M.J. de Boer, J. H. de Boer, C.J.M. van Rijn and M. Elwenspoek
Microsieve supporting palladium-silver alloy membranes and application to hydrogen separation
Journal of Microelectromechanical Systems 14 (2005) pp. 113-123.

H.D. Tong, A.H.J. vanden Berg, J.G.E. Gardeniers, H.V. Jansen, F.C. Gielens, and M.C. Elwenspoek
Preparation of palladium-silver alloy films by a dual sputtering technique and its application in hydrogen separation membrane
Thin Solid Films 479 (2005) pp. 89-94.

R.M. Tiggelaar, J.W. Berenschot, P. van Male, R.E. Oosterbroek, J.G.E. Gardeniers, M.H.J.M. de Croon, J.C. Schouten, A. van den Berg and M.C. Elwenspoek
Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane
Sensors and Actuators A 119 (2005) pp. 196-2054.

H. Wensink, F. Benito-Lopez, Dorothee C. Hermes, W. Verboom, J.G.E. Gardeniers, D.N. Reinhoudt, A. van den Berg
Measuring reaction kinetics in a lab-on-a-Chip by microcoil NMR
Lab on a Chip 5 (2005) pp. 280-284.

R.M. Tiggelaar, J.W. Berenschot, J.H. de Boer, R.G.P. Sanders, J.G.E. Gardeniers, R.E. Oosterbroek, A. van den Berg and M.C. Elwenspoek
Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes
Lab on a Chip 5 (2005) pp. 326-336.

M. Brivio, N. Tas, M.H. Goedbloed, Han J.G.E. Gardeniers, W. Verboom, A. van den Berg and D.N. Reinhoudt
A MALDI-chip integrated system with a monitoring window
Lab on a Chip 5 (2005) pp. 378-381.

F. Benito-López, W. Verboom, M. Kakuta, J.G.E. Gardeniers, R.J.M. Egberink, R.E. Oosterbroek, A. van den Berg and D.N. Reinhoudt
Optical fiber-based on-line UV/Vis spectroscopic monitoring of chemical reaction kinetics under high pressure in a capillary microreactor
Chemical Communications, 2005, 2857-2859.

E.J. van der Wouden, T. Heuser, D.C. Hermes, R.E. Oosterbroek, J.G.E. Gardeniers and A. van den Berg
Field-effect control of electro-osmotic flow in microfluidic networks
Colloids and Surfaces A 267 (2005) 110-116.

J.G.E. Gardeniers and A. van den Berg
Micro and nanofluidic devices for environmental and biomedical applications
International Journal of Environmental Analytical Chemistry 84 (2004) pp. 809-819.

J.G.E. Gardeniers and A. van den Berg
Lab-on-a-Chip systems for biomedical and environmental monitoring
Analytical and Bioanalytical Chemistry 378 (2004) pp. 1700-1703.

D. Clicq, R.W. Tjerkstra, J.G.E. Gardeniers, A. van den Berg, G. V. Baron and G. Desmet
Porous silicon as a stationary phase for shear-driven chromatography
Journal of Chromatography A 1032 (2004) pp. 185-191.

R.M. Tiggelaar, P.W.H. Loeters, P. van Male, R.E. Oosterbroek, J.G.E. Gardeniers, M.H.J.M. de Croon, J.C. Schouten, M.C. Elwenspoek and A. van den Berg
Thermal and mechanical analysis of a microreactor for high-temperature catalytic gas phase reactions
Sensors and Actuators A 112 (2004) pp. 267-277.

H.D. Tong, F.C. Gielens, J.G.E. Gardeniers, H.V. Jansen, C.J.M. van Rijn and M. Elwenspoek
Microfabricated palladium-silver alloy membranes and their application in hydrogen separation
Industrial & Engineering Chemistry Research 43 (2004) pp. 4182-4187.

F.H.J. van der Heyden, M.T. Blom, J.G.E. Gardeniers, E. Chmela, M. Elwenspoek, R. Tijssen and A. van den Berg
A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector
Sensors and Actuators B 92 (2003) pp. 102-109.

Q.-S. Pu, R. Luttge, J.G.E. Gardeniers and A. van den Berg
Comparison of capillary zone electrophoresis performance of powder blasted and hydrogen fluoride etched microchannels in glass
Electrophoresis 24 (2003) pp. 162-171.

R.M. Tiggelaar, T.T. Veenstra, R.G.P. Sanders, J.W. Berenschot, M.C. Elwenspoek, A. van den Berg, J.G.E. Gardeniers, A. Prak, R. Mateman, and J.M. Wissink
Analysis systems for the detection of ammonia based on micromachined components: modular hybrid versus monolithic integrated approach
Sensors and Actuators B 92 (2003) pp. 25-36.

H.D. Tong, J.W. Berenschot, M.J. De Boer, J.G.E. Gardeniers, H. Wensink, H.V. Jansen, W. Nijdam, M.C. Elwenspoek, F.C. Gielens, and C.J.M. van Rijn
Microfabrication of palladium-silver alloy membranes for hydrogen separation
Journal of Microelectromechanical Systems 12 (2003) pp. 622-629.

J.G.E. Gardeniers, R. Luttge, J.W. Berenschot, M.J. de Boer, Y. Yeshurun, M. Hefetz, R. van 't Oever and A. van den Berg
Silicon micromachined hollow microneedles for transdermal fluidic transport
Journal of Microelectromechanical Systems 12 (2003) pp. 855-862.

J.G.E. Gardeniers and A. van den Berg
Lab-on-a-Chip systems for biomedical and environmental monitoring
International Journal of Computational Engineering Science 4 (2003) pp. 157-162.

T.T. Veenstra, N.R. Sharma, F.K. Forster, J.G.E. Gardeniers, M.C. Elwenspoek and A. van den Berg
The design of an in-plane compliance structure for microfluidical systems
Sensors and Actuators B 81 (2002) pp. 377-383

R.M. Tiggelaar, T.T. Veenstra, R.G.P. Sanders, J.G.E. Gardeniers, M.C. Elwenspoek and A. van den Berg
A light detection cell to be used in a micro analysis system for ammonia
Talanta 56 (2002) pp. 331-339.

M.J. de Boer, J.G.E. Gardeniers, H.V. Jansen, E. Smulders, M.J. Gilde, G. Roelofs, J.N. Sasserath and M. Elwenspoek
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
Journal of microelectromechanical systems 11 (2002) pp. 385-401.

M.T. Blom, E. Chmela, J.G.E. Gardeniers, R. Tijssen, M. Elwenspoek and A. van den Berg
Design and fabrication of a hydrodynamic chromatography chip
Sensors and Actuators B 82 (2002) pp. 111-116.

E. Chmela, R. Tijssen, M.T. Blom, J.G.E. Gardeniers and A. van den Berg
A chip system for size separation of macromolecules and particles by hydrodynamic chromatography
Analytical Chemistry 74 (2002) pp. 3470-3475.

E. Chmela, M.T. Blom, J.G.E. Gardeniers, A. van den Berg and R. Tijssen
A pressure driven injection system for an ultra-flat chromatographic microchannel
Lab on a Chip 2 (2002) pp. 235-241.

M.T. Blom, N.R. Tas, G. Pandraud, E. Chmela, J.G.E. Gardeniers, R. Tijssen, M. Elwenspoek and A. van den Berg
Failure mechanisms of pressurized micro channels, model and experiments
Journal of Micro Electro Mechanical Systems 10 (2001) pp. 158-164.

T.T. Veenstra, J.W. Berenschot, J.G.E. Gardeniers, R.G.P. Sanders, M.C. Elwenspoek and A. van den Berg
The use of selective anodic bonding to create micropump chambers with virtually no dead volume
Journal of the Electrochemical Society 148 (2001) pp. G68-G72.

A.J. Nijdam, E. van Veenendaal, H.M. Cuppen, J. van Suchtelen, M.L. Reed, J.G.E. Gardeniers, W.J.P. van Enckevort, E. Vlieg and M. Elwenspoek
Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte carlo simulations
Journal Applied Physics 89 (2001) pp. 4113-4123.

A.J. Nijdam, J.G.E. Gardeniers, J.W. Berenschot, E. van Veenendaal, J. van Suchtelen and M. Elwenspoek
Influence of the angle between etched (near) Si(111) and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon
Journal of Micromechanics and Microengineering 11 (2001) pp. 499-503

M.T. Blom, E. Chmela, J.G.E. Gardeniers, J.W. Berenschot, M. Elwenspoek, R. Tijssen and A. van den Berg
Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections
Journal of Micromechanics and Microengineering 11 (2001) pp. 382-385.

M.J. de Boer, R.W. Tjerkstra, J.W. Berenschot, H.V. Jansen, G.J. Burger, J.G.E. Gardeniers, M. Elwenspoek and A. van den Berg
Micromachining of buried microchannels in silicon
Journal of Micro Electro Mechanical Systems 9 (2000) pp. 94-103.

C.R. Neagu, H.V. Jansen, J.G.E. Gardeniers and M. Elwenspoek
The electrolysis of water: an actuation principle for MEMS with a big opportunity
Mechatronics 10 (2000) pp.571-582.

E. van Veenendaal, J. van Suchtelen, W.J.P. van Enckevort, K. Sato, A.J. Nijdam, J.G.E. Gardeniers and M. Elwenspoek
The construction of orientation-dependent crystal growth and etch rate functions, II. Application to wet chemical etching of silicon in potassium hydroxide
Journal of Applied Physics 87 (2000) pp. 8732-8740.

A.J. Nijdam, E. van Veenendaal, J.G.E. Gardeniers, A.P.M. Kentgens, G.H. Nachtegaal, and M. Elwenspoek
²⁹Si-Nuclear Magnetic Resonance on the etching products of silicon in potassium hydroxide solutions
Journal of the Electrochemical Society 147 (2000) pp. 2195-2198.

E. van Veenendaal, A.J. Nijdam, J. van Suchtelen, K. Sato, J.G.E. Gardeniers, W.J.P. van Enckevort and M. Elwenspoek
Simulation of anisotropic wet-chemical etching using a physical model
Sensors and Actuators A 84 (2000) pp. 324-329.

A.J. Nijdam, J.G.E. Gardeniers, C. Gui and M. Elwenspoek
Etch pits and dislocations in Si {111}
Sensors and Actuators A 86 (2000) pp. 238-247.

R.W. Tjerkstra, J.G.E. Gardeniers, J.J. Kelly and A. van den Berg
Multi walled microchannels: Free-standing porous silicon membranes for use in mTAS
Journal of Micro Electro Mechanical Systems 9 (2000) pp. 495-501.

A.J. Nijdam, J.W. Berenschot, J. van Suchtelen, J.G.E. Gardeniers and M. Elwenspoek
Velocity sources as an explanation for experimentally observed variations in Si {111} etch rates
Journal of Micromechanics and Microengineering 9 (1999) pp. 135-138.

A.J. Nijdam, J. van Suchtelen, J.W. Berenschot, J.G.E. Gardeniers and M. Elwenspoek
Etching of silicon in alkaline solutions: a critical look at the {111} minimum
Journal of Crystal Growth 198-199 (1999) pp. 430-434.

C. Gui, G.J. Veldhuis, T.M. Koster, P.V. Lambeck, J.W. Berenschot, J.G.E. Gardeniers and M. Elwenspoek
Fabrication of nanomechanical optical devices with aligned wafer bonding

Microsystem Technologies 5 (1999) pp. 138-143.

C. Gui, M. Elwenspoek, N.R. Tas and J.G.E. Gardeniers
The effect of surface roughness on direct wafer bonding
Journal of Applied Physics 85 (1999) pp. 7448-7454.

J.G.E. Gardeniers, A.G.B.J. Verholen, N.R. Tas and M. Elwenspoek
Direct measurement of piezoelectric properties of sol-gel PZT films
Journal of the Korean Physical Society 32 (1998) pp. S1573-S1577.

J.G.E. Gardeniers, Z.M. Rittersma and G.J. Burger
Preferred orientation and piezoelectricity in sputtered ZnO films
Journal of Applied Physics 83 (1998) pp. 7844-7854.

C. Gui, M.J. de Boer, J.G.E. Gardeniers, H.V. Jansen, J.W. Berenschot and M. Elwenspoek
Fabrication of multi layer substrates for high aspect ratio single crystalline microstructures
Sensors & Actuators A 70 (1998) pp. 61-66.

C.Q. Gui, M. Elwenspoek, J.G.E. Gardeniers and P.V. Lambeck
Present and future role of Chemical Mechanical Polishing in wafer bonding
Journal of the Electrochemical Society 145 (1998) pp. 2198-2204.

G.J. Veldhuis, C. Gui, T. Nauta, T.M. Koster, J.W. Berenschot, P.V. Lambeck, J.G.E. Gardeniers and M. Elwenspoek
Mechano-optical waveguide on/off intensity switch
Optics Letters 23 (1998) pp. 1532-1534.

C. Gui, H. Albers, J.G.E. Gardeniers, M. Elwenspoek and P.V. Lambeck
Fusion bonding of rough surfaces with polishing technique for silicon micromachining
Microsystem Technologies 3 (1997) pp.122-128.

C.R. Neagu, J.G.E. Gardeniers, M.C. Elwenspoek and J.J. Kelly
An electrochemical active valve
Electrochimica Acta 42 (1997) pp.3367-3373.

R.W. Tjerkstra, M.J. de Boer, J.W. Berenschot, J.G.E. Gardeniers, A. van den Berg and M.C. Elwenspoek
Etching technology for chromatography microchannels
Electrochimica Acta 42 (1997) pp.3399-3406.

C.R. Neagu, H.V.Jansen, A. Smith, J.G.E. Gardeniers and M.C. Elwenspoek
Characterization of a planar microcoil for implantable Microsystems
Sensors and Actuators A 62 (1997) pp.599-611.

Cs. Dücso, É. Vázsonyi, M. Ádám, I. Szabó, I. Bársony, J.G.E. Gardeniers and A. van den Berg
Porous silicon bulk micromachining for thermally isolated membrane formation
Sensors and Actuators A 60 (1997) pp.235-239.

M.W. van Toor, T.S.J. Lammerink, J.G.E. Gardeniers, M. Elwenspoek and D. Monsma
A novel micromechanical flow controller
Journal of Micromechanics and Microengineering 7 (1997) pp. 165-169.

C.R. Neagu, J.G.E. Gardeniers, M. Elwenspoek and J.J. Kelly
An electrochemical microactuator: principle and first results
Journal of Micro Electro Mechanical Systems 5 (1996) pp.2-9.

H.V. Jansen, J.G.E. Gardeniers, M.J. de Boer, M. Elwenspoek and J.H.J. Fluitman
A survey on the reactive ion etching of silicon in microtechnology
Journal of Micromechanics and Microengineering 6 (1996) pp.14-28.

P. Bressers, J.J. Kelly, J.G.E. Gardeniers and M. Elwenspoek
Surface morphology of (100) silicon etched in aqueous alkaline solution
Journal of the Electrochemical Society 143 (1996) pp.1744-1750.

S.L. King, J.G.E. Gardeniers and I.W. Boyd
Pulsed-laser deposited ZnO for device applications
Applied Surface Science 96-98 (1996) pp.811-818.

J.G.E. Gardeniers, H.A.C. Tilmans and C.C.G. Visser
LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design
Journal of Vacuum Science and Technology A 14 (1996) pp.2879-2892.

V. Craciun, S. Amirhaghi, D. Craciun, J. Elders, J.G.E. Gardeniers and I.W. Boyd
Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition
Applied Surface Science 86 (1995) pp.99-106.

V. Craciun, J. Elders, J.G.E. Gardeniers, J. Geretovsky and I.W. Boyd
Growth of ZnO thin films on GaAs by pulsed laser deposition
Thin Solid Films 259 (1995) pp.1-4.

J.G.E. Gardeniers, A. Smith and C. Cobianu
Characterization of sol-gel PZT films on Pt-coated substrates
Journal of Micromechanics and Microengineering 5 (1995) pp.153-155

R.G. Heideman. P.V. Lambeck and J.G.E. Gardeniers
High quality ZnO layers with adjustable refractive indices for integrated optics applications
Optical Materials 4 (1995) pp.741-755.

J.G.E. Gardeniers en N.G. Laursen
Corrosion of protective layers on strained silicon surfaces in alkaline solutions
Sensors and Materials 5 (1994) pp.189-208.

H.V. Jansen, J.G.E. Gardeniers, J. Elders, H.A.C. Tilmans and M. Elwenspoek
Applications of fluorocarbon polymers in micromechanics and micromachining
Sensors and Actuators A 41-42 (1994) pp.136-140.

J.W. Berenschot, J.G.E. Gardeniers, T.S.J. Lammerink and M. Elwenspoek
New applications of R.F.-sputtered glass films as protection and bonding layers in silicon micromachining
Sensors and Actuators A 41-42 (1994) pp.338-343.

V. Craciun, J. Elders, J.G.E. Gardeniers en I.W. Boyd
Characteristics of high quality ZnO thin films deposited by pulsed laser deposition
Applied Physics Letters 65 (1994) pp.2963-2965.

J.G.E. Gardeniers, C.H. Klein Douwel and L.J. Giling
Reduced pressure silicon CVD on hemispherical substrates
Journal of Crystal Growth 108 (1991) pp.319-334.

J.G.E. Gardeniers and L.J. Giling
Vapour growth of silicon, growth anisotropy and adsorption
Journal of Crystal Growth 115 (1991) pp.542-550.

J.G.E. Gardeniers, L.J. Giling, F. de Jong and J.P. van der Eerden
A theoretical study of adsorption equilibria in silicon CVD
Journal of Crystal Growth 104 (1990) pp.727-743.

J.G.E. Gardeniers, M.M.W. Mooren and L.J. Giling
Roughening effects during silicon CVD studied by the use of hemispherical substrates
Surface Science 236 (1990) pp.85-102.

J.G.E. Gardeniers, F. de Jong and L.J. Giling
Equilibrium structure of Si (001) in relation to adsorption processes during silicon CVD
Surface Science 233 (1990) pp.123-130.

J.G.E. Gardeniers, M.M.W. Mooren, M.H.J.M. de Croon and L.J. Giling
The influence of the chlorine hydrogen ratio in the gas phase on the stability of the {113} faces of silicon in Si-H-Cl CVD
Journal of Crystal Growth 102 (1990) pp.233-244.

J.G.E. Gardeniers, W.E.J.R. Maas, R.Z.C. van Meerten and L.J. Giling
Influence of temperature on the crystal habit of silicon in the Si-H-Cl CVD system;
part I. Experimental results
Journal of Crystal Growth 96 (1989) pp.821-831.

J.G.E. Gardeniers, W.E.J.R. Maas, R.Z.C. van Meerten and L.J. Giling
Influence of temperature on the crystal habit of silicon in the Si-H-Cl CVD system; part II. Surface tension of faces in the <110> zones
Journal of Crystal Growth 96 (1989) pp.832-842.

M.H.J. Hottenhuis, J.G.E. Gardeniers, L.A.M.J. Jetten and P. Bennema
Potassium hydrogen phtalate: relation between crystal structure and crystal morphology
Journal of Crystal Growth 92 (1988) pp.171-188.

Book chapters:

J.G.E. Gardeniers and A. van den Berg
Microfabrication and integration, chapter 3 in: "Separation methods in microanalytical systems"
eds. J. Kutter and Y. Fintschenko, CRC Taylor & Francis, Boca Raton, FL, USA, 2005,
ISBN 0824725301, pp. 55-106.

J.G.E. Gardeniers, R.E. Oosterbroek and A. van den Berg
Silicon and glass micromachining for μTAS, in: "Lab-on-a-chip: Miniaturized systems for (bio)chemical analysis and synthesis", eds. R.E. Oosterbroek and A. van den Berg, Elsevier,
ISBN 0-444-51100-8, 2003, pp. 37-64.

J.G.E. Gardeniers
Nieuwe materialen en vervangende technieken voor sensoren (New materials and alternative techniques for sensors), Chapter 9 in: "Het sensorenboek. Theorie van sensoren en sensorprincipes" (The sensor book, Theory of sensors and sensor principles), ed. G.A. Schwippert, Ten Hagen & Stam, Deventer, The Netherlands, 2002, ISBN .90-44000-50-0, pp. 397-453.