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Research
Research at TST is embedded in the MESA+ Research Institute for Nanotechnology. We specialize in three-dimensional nano- and microfabrication based on top down lithography methods. We invent new fabrication techniques, demonstrate them on various devices with the aim to ultimately transfer our knowledge to industry. We work on three generations of fabrication technologies, in different stages of the process between fundamental research and application:
Microtechnology
By using conventional lithography techniques, thin layer deposition and deep reactive ion etching we are able to realize very complex three-dimensional structures out of Si wafers in the range of 100 um up to several millimeters. The technology has matured to such a level that we can realize sophisticated micromechanical devices as for instance sensors and actuators. In this field of research we cooperate intimately with industry, with the objective to bring products to the market. Research questions therefore are driven by industrial demand. |
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Nanotechnology
Using the conventional lithography techniques the MESA+ cleanroom offers, we are able to realize mechanical structures in the sub 100 nm range by applying edge and corner lithography. This unique technique allows for wafer-scale fabrication of nanodevices, if device density is not a primary objective. We work on improving the technique towards smaller dimensions and a large variation in materials. The methods are now becoming available to industry, for instance in the area of probe microscopy. Next to conventional lithography, we also specialize in laser interference lithography, which allows for full wafer regular pattern formation with periodicities down to 150 nm and feature sizes of 50 nm. |
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Self assembly
Techniques based on lithography are limited in the complexity that can be obtained in the third dimension. Therefore we actively pursue three-dimensional self-assembly techniques. We seek to lever the knowledge acquired by macromolecular science in the last decades, replacing the molecules with micromachined counterparts. The aim is to develop a fabrication strategy that will ultimately replace todays two-dimensional micro- and nanomanufacturing technology. |
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