MME2010

Poster session D

Tuesday 28 September, 14:45 – 17:15

D01
Application of silicon micro-needles in liquid-based sensors and vapor transport
Z. Sanaee and S. Mohajerzadeh
University of Tehran, School of Electrical and Computer Eng, Nano-electronic Center of Excellence, Thin Film and Nano-Electronic Lab, Iran

D02
Metallic layer for EM pressure sensor sensitivity improvement
S. Bouaziz^1,2, M. Mehdi Jatlaoui¹, D. Mingli¹, P. Pons¹ and H. Aubert^1,2
1CNRS, LAAS, Toulouse, France
²Université de Toulouse, INP, LAAS, France

D03
Microfabrication and characterization of thin-films solid-state rechargeable lithium battery
J.F. Ribeiro¹, M.F. Silva¹, L.M. Goncalves¹, M.M. Silva² and J. H. Correia^1
1University of Minho, Algoritmi Centre, Portugal
²University of Minho, Chemistry Centre, Portugal

D04
Determination of young’s modulus of PZT – influence of cantilever orientation
H. Nazeer¹, L.A. Woldering¹, L. Abelmann¹ and M.C. Elwenspoek^1,2
1MESA+ institute for nanotechnology, University of Twente, The Netherlands
²Freiburg institute for Advanced Studies, Albert-Ludwigs-Universitat Freiburg, Germany

D05
Tungsten-siliconnitride medium for mega- to gigayear data storage
J. de Vries¹, L. Abelmann¹, A. Manz² and M. Elwenspoek^1,2
1MESA+ institute for nanotechnology, University of Twente, The Netherlands
²Freiburg institute for Advanced Studies, Albert-Ludwigs-Universitat Freiburg, Germany

D06
Controlled increase and stabilisation of the tuning range of RF-MEMS capacitors with an active lid electrode
J. Love¹, M. Hill¹ and C. O’Mahony^2
1Adaptive Wireless Systems Group, Cork Institute of Technology, Ireland
²Tyndall National Institute, University College Cork, Ireland

D07
Two-degree-of-freedom capacitive MEMS velocity sensor: initial test measurements
A. Alshehri¹, M. Kraft¹ and P. Gardonio^2
1EDS, University of Southampton, UK
²DIEGM, Università degli Studi di Udine, Italy

D08
Computational analysis of microparticle seperation in straight channels
H. Kizil¹, L. Trabzon², L. Yobas³, M. Yilmaz¹ and A. Ozbey^2
1Department of Materials and Metallurgical Engineering, Istanbul Technical University, Turkey
²Department of Mechanical Engineering, Istanbul Technical University, Turkey
³Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong

D09
Fabrication of cantilever arrays with tips for parallel optical readout
W.W. Koelmans¹, T. Peters¹, L. Abelmann¹ and M.C. Elwenspoek^1,2
1MESA+ and IMPACT Research Institutes, University of Twente, The Netherlands
²Freiburg institute for Advanced Studies, Albert-Ludwigs-Universitat Freiburg, Germany

D10
Morphological characterisation of micromachined film bulk acoustic resonator structures manufactured on GaN/Si
A. Cismaru¹, A. Stavrinidis², A. Stefanescu¹, D. Neculoiu¹, G. Konstantinidis² and A. Müller^1
1IMT-Bucharest, Romania
²FORTH-IESL-MRG Heraklion, Greece

D11
Static crack growth and fatigue modeling for silicon MEMS
W.M. van Spengen
TU Delft, 3mE-PME, The Netherlands

D12
Development of a novel micromirror with high static rotation angle for measurement applications
S. Weinberger, O. Jakovlev, C.H. Winkelmann, E. Markweg, T. Polster and M. Hoffmann
Ilmenau University of Technology, IMN MacroNano®, Department of Micromechanical Systems, Germany

D13
Applications of all-(111) surface silicon nanowires
M.N. Masood, S. Chen, E.T. Carlen and A. van den Berg
BIOS Lab on a Chip, MESA+ Institute for Nanotechnology, University of Twente, The Netherlands

D14
A micromirror for optical projection displays
R.A. Brookhuis¹, M.J. de Boer¹, M. Dijkstra¹, A.A. Kuijpers², D. van Lierop² and R.J. Wiegerink^1
1MESA+ institute for nanotechnology, University of Twente, The Netherlands
²Philips Applied Technologies, Eindhoven, The Netherlands

D15
Frequency shift of MEMS electromechanical resonators induced by process variation
F. Casset¹, J. Arcamone¹, A. Niel¹, E. Lorent¹, C. Marcoux¹, Y. Civet³, C. Durand², E. Ollier¹, P. Renaux¹, JF. Carpentier², P. Ancey² and P. Robert^1
1CEA, LETI, MINATEC, France
²STMicroelectronics, France
³TIMA, CNRS, Grenoble INP, France

D16
Wet etching optimization for arbitrarily shaped planar electrode structures
H. Rattanasonti¹, R.C. Sterling², P. Srinivasan¹, W.K. Hensinger² and M. Kraft^1
1School of Electronics and Computer Science, University of Southampton, UK
²Department of Physics and Astronomy, University of Sussex, UK

D17
Thermal behaviour of three dimensional single crystalline force sensors
G. Battistig¹, T. Weidisch², T. Retkes², M. Ádám¹, I. Bársony¹ and T. Mohácsy^1
1Research Institute for Technical Physics and Materials Science - MFA, Hungarian Academy of Sciences, Hungary
²Department of Electron Devices of the Budapest University of Technology and Economics, Hungary

D18
Incorporation of in-plane electrical interconnects to the reflow bonding
B. Mogulkoc¹, H.V. Jansen¹, H.J.M. ter Brake¹ and M.C. Elwenspoek^1,2
1MESA+ and IMPACT Research Institutes, University of Twente, The Netherlands
²Freiburg institute for Advanced Studies, Albert-Ludwigs-Universitat Freiburg, Germany

D19
Piezoelectric power harvesting device with multiple resonant frequencies
Z. Chew and L. Li
Swansea University, School of Engineering, UK

D20
Reliability modelling of MEMS cantilever switches under variable actuation stress levels
P. Fitzgerald¹ and M. Hill^2
1Cork Institute of Technology, Ireland and Analog Devices
²Cork Institute of Technology, Cork, Ireland