Devices for Integrated Circuits

Chair: SC

Introduction

We study new materials, new device concepts, and new characterization techniques, to contribute to the advancement of silicon circuit technology. Focal points of our research are:

IC processing, covering topics including

·	CMOS wafer post-processing - can we fabricate new components on top of a microchip? See our position paper on this subject.

·	Novel devices – can we incorporate light emitting diodes, high-quality passives, gas sensors etc. into a CMOS process?

·	Nanotechnology, such as novel thin films, nanocrystal memories, ultrathin silicon, and silicon nanowires

Device characterization and reliability:

·	Novel characterization methods to measure the capacitance-voltage relation

·	Improving characterization methods to measure contact resistances

·	Reliability of MOS devices, interconnect, and novel devices

Device physics and modelling, covering topics including:

·	Ultra-thin silicon – can we understand and model silicon, when it is hardly three-dimensional anymore?

·	How is a bulk-acoustic-wave resonator modelled?

·	How are silicon LED’s modelled?

Programme mentor

·	dr. C. Salm

Compulsory courses

Code	Course	Study load (EC)
191210730	Technology	5
191211440	Integrated Circuit Technology	5
191211000	Advanced Semiconductor Devices	5

One additional compulsory course will be chosen by the programme mentor from the following list, after discussion with the student:

Code	Course	Study load (EC)
191210740	Material Science	5
191411281	Introduction Quantum-mechanics (Dutch)	5
191210750	System-on-Chip Design	10
191210850	Advanced Analog IC Electronics	5
193400141	Nanoelectronics	5

Website for more information

http://www.utwente.nl/ewi/sc/