Transducers Science and Technology (TST)

Short description of research activities:

Based on photolithography structures can be manufactured with a large variety of functions. Most wellknown is Integrated Circuit technology, but quite soon after its invcention people realized that also mechanical structures can be made by photolithography. This technique is now called

“micromachining”; the whole field including microelectronics is called Microsystems Technology

(MST). When applied for structures with mechanical functions it is called MEMS (microelectromechanical systems). MEMS is the main research issue for the chair of Transducers

Science and Technology. MEMS activities started in the early 1980ies and the group in Twente is one of the first active in this field and has contributed significantly to it.

In TST research is conducted on six main themes: micromachining, nanotechnology, sensors, actuators and fluid handling systems and probe recording/microscopy. In all these themes Ph.D. student and Master students are carrying out their projects. We are asked to address mainly issues related to spectra. Well, we have a whole spectrum of research items.